プロセスの種類別のバルブステート ID
表には、特定のプロセスにおいて、さまざまな種類のブロック (プリフロー、カットフロー、ピアシング) およびガスに対して、バルブがアクティブ (ON) か非アクティブ (OFF) かが示されています。
| プロセス ID: 1001、1002、1003、1004、1005、1151、1152、1153、1155、1156 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 7001、7004、7005、7007、7008、7009、7010、7011、7012、7013、7018、7020 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/O2 | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 8001 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 9001、9010、9018 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | Ar/エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | Ar/エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | Ar/エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 2051、2054、2057、2100、8004、8005、8006 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 2010、2011、2028、2029、2052、2055、2058 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/H2O | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | N2/H2O | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | N2/H2O | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 2053、2056、2059、2060、2061、2062、2063、2064、2065、2066 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | 混合/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| ピアシング中 | 混合/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| プロセス ID: 1201, 1203, 1206, 1251, 1252, 1253, 1254, 1255, 1281, 1282, 1283, 1284, 1285, 1286, 1287 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 1051、7014、7015 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/O2 | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/O2 | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/O2 | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 1101、1102 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 1103、1104、1105、1106、1107 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 7002、7003、7006 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/O2 | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 2001、2002、2003、2004、2005 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | F5/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | F5/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 2006、2007、2012、2013、2014、2015、2024、2025、2026 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 2008、2009 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | エア / エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | エア / N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 2016、2017、2018、2019 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | エア / エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | エア / エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 2020、2021、2022、2023 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | F5/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | F5/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 9004、9005、9006、9014、9015、9016、9017 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 8007、8010 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 9007、9019 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | Ar/エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | Ar/エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | Ar/エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 9008 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | Ar/エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | Ar/エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 9002、9003、9009 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 1202、1204 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 2027、2101 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | エア / エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | エア / エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 8002 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 1205 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/Ar | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 1207 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 9011、9012、9013 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 1060、1061、7016、7017 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 1157 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/Ar | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 7019 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/O2 | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/O2 | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 1288 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/エア | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/Ar | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 1289 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/ エア | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | O2/Ar | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | O2/Ar | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 2071、2073、2075 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| カットフロー | 混合/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| ピアシング中 | 混合/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| プロセス ID: 2072、2074 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| カットフロー | 混合/N2 | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| ピアシング中 | 混合/Ar | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| プロセス ID: 2076 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/Ar | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| カットフロー | 混合/Ar | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| ピアシング中 | 混合/Ar | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | ON (オン) | |
| プロセス ID: 8011 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | N2/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| プロセス ID: 9020、9021 | ||||||||||||||||||||
| ブロックの種類 | ガス | V1 | V4 | V5 | V6 | V7 | V8 | V9 | V10 | V11 | V12 | B1 | B2 | B3 | B4 | B5 | B8 | B9 | B10 | |
| プリフロー | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| カットフロー | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
| ピアシング中 | Ar/N2 | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | ON (オン) | ON (オン) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | Off (オフ) | |
